发明名称 半導体装置
摘要 <p>An object of the present invention is to provide a semiconductor device which has flexibility and resistance to a physical change such as bending and a method for manufacturing the semiconductor device. A semiconductor device of the present invention includes a plurality of transistors provided over a flexible substrate, each of which has a semiconductor film, a gate electrode provided over the semiconductor film with a gate insulating film therebetween, and an interlayer insulating film provided to cover the gate electrode, and a bending portion provided between the plurality of transistors, in which the bending portion is provided by filling an opening formed in the interlayer insulating film with a material having a lower elastic modulus, a material having a lower glass transition point, or a material having a higher plasticity than that of the interlayer insulating film.</p>
申请公布号 JP5703362(B2) 申请公布日期 2015.04.15
申请号 JP20130239445 申请日期 2013.11.20
申请人 发明人
分类号 H01L21/336;G06K19/077;H01L21/02;H01L21/76;H01L21/762;H01L27/12;H01L29/786;H01L51/50;H05B33/14 主分类号 H01L21/336
代理机构 代理人
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