| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a magnetic sensor device capable of detecting three axial directions without combining a plurality of chips, and a manufacturing method of the magnetic sensor device. <P>SOLUTION: A magnetic sensor device includes: a substrate 10; a base sacrificial layer 20 provided on the substrate 10; and a flexible layer 30 contacting with the base sacrificial layer 20, and having one surface 31 with an area of a part contacting with the base sacrificial layer 20 being larger than the base sacrificial layer 20. A plurality of magnetic resistance element portions 42 are provided on the flexible layer 30. A direction of magnetization of a pin magnetic layer 42a of one of the magnetic resistance element portions 42 is turned in parallel with a surface 11 of the substrate 10, thereby detecting magnetization in an X-axis direction or a Y-axis direction. The flexible layer 30 is warped in a semi-cylindrical shape from a contact place with the base sacrificial layer 20, so that the direction of the magnetization of the pin magnetic layer 42a of one of the magnetic resistance element portions 42 is tilted in the X-axis direction and the Y-axis direction, thereby detecting magnetization in a Z-axis direction. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
