发明名称 ナノ微粒子を担持したナノ構造体の製造方法
摘要 PROBLEM TO BE SOLVED: To create a new structure to be a diversified functional device, and to improve conversion ratio of the device and to achieve area enlargement of the device.SOLUTION: A nano structure carries nano particles comprising a plurality of columnar bodies of an organic material having 0.5-20 nm diameter and erected on a substrate, and nano particles having 0.2-10 nm diameter and carried on at least the surface of the columnar bodies. Also a method for producing the nano structure includes: a nano particle forming step of uniformly forming nano particles having 0.5-20 nm diameter on a flat plate of an organic material; and a columnar body forming step of forming a plurality of columnar bodies by etching the flat plate, on which nano particles are formed in the nano particle forming step, by reactive ion-etching using the nano particle as a mask, and allowing nano particles having 0.2-10 nm diameter to be carried on at least the surface of the columnar bodies.
申请公布号 JP5700397(B2) 申请公布日期 2015.04.15
申请号 JP20100177455 申请日期 2010.08.06
申请人 发明人
分类号 B82B3/00;B01J31/26;B82Y40/00;C01B31/02;H01J1/304;H01J9/02 主分类号 B82B3/00
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