发明名称 A METHOD OF MANUFACTURING A STRUCTURE COMPRISING ELONGATE NANOSTRUCTURES ADAPTED TO BE TRANSFERRED TO A NON-CRYSTALLINE LAYER
摘要 The invention regards a method of manufacturing a structure adapted to be transferred to a non-crystalline layer. The method comprises the steps of providing a substrate having a crystal orientation, providing a plurality of elongate nanostructures (nanowires) on said substrate, said nanostructures extending from the substrate such that the angle defined by the axis of elongation of each nanostructure and the surface normal of the substrate is smaller than 55 degrees, depositing at least one layer of material such that at least the exposed regions of the substrate are covered by said material, removing the substrate such that the deposited layer becomes lowermost layer and exposing at least the extremity of the respective nanostructure of the plurality of nanostructures. Invention also regards a structure manufactured using said method.
申请公布号 EP2859588(A1) 申请公布日期 2015.04.15
申请号 EP20130733088 申请日期 2013.06.05
申请人 QUNANO AB 发明人 OHLSSON, JONAS;SAMUELSON, LARS;TEGENFELDT, JONAS;ÅBERG, INGVAR;ASOLI, DAMIR
分类号 G01N27/414;B82Y10/00;B82Y40/00;H01L21/02;H01L29/06;H01L29/10;H01L29/66;H01L29/775 主分类号 G01N27/414
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