Variable resistance element and method of manufacturing the same

摘要

A variable resistance element including: a first electrode; a second electrode; and a variable resistance layer having a resistance value which reversibly changes according to electrical signals applied, wherein the variable resistance layer includes a first variable resistance layer comprising a first oxygen-deficient transition metal oxide, and a second variable resistance layer comprising a second transition metal oxide having a degree of oxygen deficiency lower than a degree of oxygen deficiency of the first oxygen-deficient transition metal oxide, the second electrode has a single needle-shaped part at an interface with the second variable resistance layer, and the second variable resistance layer is interposed between the first variable resistance layer and the second electrode, is in contact with the first variable resistance layer and the second electrode, and covers the single needle-shaped part.

主权项

1. A variable resistance element comprising: a first electrode; a second electrode; and a variable resistance layer interposed between the first electrode and the second electrode and in contact with the first electrode and the second electrode, the variable resistance layer having a resistance value which is reversibly changeable according to electrical signals applied between the first electrode and the second electrode,
wherein the variable resistance layer includes a first variable resistance layer comprising a first oxygen-deficient transition metal oxide, and a second variable resistance layer comprising a second transition metal oxide having a degree of oxygen deficiency lower than a degree of oxygen deficiency of the first oxygen-deficient transition metal oxide, wherein the first variable resistance layer and the second variable resistance layer are stacked, wherein the second electrode has a single needle-shaped part protruding toward the second variable resistance layer, wherein the second variable resistance layer is interposed between the first variable resistance layer and the second electrode, is in contact with the first variable resistance layer and the second electrode, and covers the single needle-shaped part of the second electrode, and wherein a height, in a thickness direction, of the single needle-shaped part of the second electrode is greater than a thickness of a portion of the second variable resistance layer at a location where the single needle-shaped part does not protrude toward the second variable resistance layer.