| 发明名称 | MEMS device with polymer layer, system of a MEMS device with a polymer layer, method of making a MEMS device with a polymer layer | ||
| 摘要 | A MEMS device, a method of making a MEMS device and a system of a MEMS device are shown. In one embodiment, a MEMS device includes a first polymer layer, a MEMS substrate disposed on the first polymer layer and a MEMS structure supported by the MEMS substrate. The MEMS device further includes a first opening disposed in the MEMS substrate and a second opening disposed in the first polymer layer. | ||
| 申请公布号 | US9006845(B2) | 申请公布日期 | 2015.04.14 |
| 申请号 | US201313743300 | 申请日期 | 2013.01.16 |
| 申请人 | Infineon Technologies, A.G. | 发明人 | Dehe Alfons |
| 分类号 | H01L29/84;B81B3/00;B81C1/00 | 主分类号 | H01L29/84 |
| 代理机构 | Slater & Matsil, L.L.P. | 代理人 | Slater & Matsil, L.L.P. |
| 主权项 | 1. A MEMS device comprising: a first polymer layer; a substrate disposed on the first polymer layer; a MEMS structure supported by the substrate; a first opening disposed in the substrate, wherein the first opening comprises an empty cavity; and a second opening disposed in the first polymer layer, wherein the second opening comprises an empty cavity, and wherein the first polymer layer further comprises small openings, the small openings being smaller than the second opening and connecting the second opening to a surface of the first polymer layer. | ||
| 地址 | Neubiberg DE | ||