Electro chemical deposition and replenishment apparatus

摘要

An electrochemical deposition apparatus adapted to deposit metal onto a surface of a substrate, the apparatus has a frame configured for holding a process electrolyte. A substrate holder is removably coupled to the frame, the substrate holder supporting the substrate in the process electrolyte. An anode fluid compartment is removably coupled to the frame and containing an anolyte and having an anode facing the surface of the substrate, the anode fluid compartment further having a ion exchange membrane disposed between the anode and the surface of the substrate, the anode fluid compartment removable from the frame as a unit with the ion exchange membrane and the anode. The holder, the anode and the membrane are arranged in the frame so that ions from the anode pass through the ion exchange membrane into and primarily replenish ions in the process electrolyte depleted by ion deposition onto the surface of the substrate.

主权项

1. An electro chemical deposition apparatus adapted to deposit metal onto a surface of a substrate, the electro chemical deposition apparatus comprising:
a frame configured for holding a process electrolyte; a substrate holder removably coupled to the frame, the substrate holder supporting the substrate in the process electrolyte; and an anode fluid compartment removably coupled to the frame and defining a fluid boundary envelope containing an anolyte in the frame, and separating the anolyte from the process electrolyte, the fluid compartment having within the boundary envelope an anode, facing the surface of the substrate, and an ion exchange membrane, disposed between the anode and the surface of the substrate, the anode fluid compartment fluid boundary envelope being removable from the frame as a unit with the ion exchange membrane and the anode; wherein, the holder, the anode and the membrane are arranged in the frame so that ions from the anode pass through the ion exchange membrane into and primarily replenish ions in the process electrolyte depleted by ion deposition onto the surface of the substrate, and wherein the frame includes first and second insert guides in which the anode fluid compartment and substrate holder are insertable within the frame and removable from the frame along the first and second insert guides in a direction parallel to the surface of the substrate.