Thermo-pneumatic actuator fabricated using silicon-on-insulator (SOI)

摘要

An ink jet printhead including a thermo-pneumatic actuator array for ejecting ink from an array of nozzles. The actuator array may include the use of a silicon-on-insulator (SOI) semiconductor wafer including a device layer, a handle layer, and a dielectric layer that physically separates the device layer from the handle layer to simplify printhead formation. During an exemplary process, the SOI wafer is attached to a heater wafer and a nozzle plate is attached to the dielectric layer such that, during use of the printhead, the device layer functions as an actuator membrane. Deflection of the device layer during use of the printhead creates a pressure within an ink chamber which causes ejection of ink from one of the nozzles of the array of nozzles.

主权项

1. A printhead comprising a plurality of thermo-pneumatic actuators as part of a thermo-pneumatic actuator array, wherein the thermo-pneumatic actuator array comprises:
a heater wafer comprising:
a substrate; anda plurality of resistors, wherein each resistor of the plurality of resistors is individually addressable; a silicon-on-insulator (SOI) wafer comprising:
a device layer that provides a thermo-pneumatic actuatable membrane between a working fluid chamber and an ink chamber for each of the plurality of thermo-pneumatic actuators;a dielectric layer attached to the device layer; anda handle layer attached to the dielectric layer, wherein the dielectric layer physically separates the device layer from the handle layer and a thickness of the handle layer determines a height of the ink chamber; and a nozzle plate comprising a plurality of nozzles, wherein the nozzle plate is attached to the handle layer.