| 发明名称 | Method of and apparatus for active energy assist baking | ||
| 摘要 | An Active Energy Assist (AEA) baking chamber includes an AEA light source assembly and a heater pedestal. The AEA baking chamber further includes a controller for controlling a power input to the AEA light source assembly and a power input to the heater pedestal. A method of forming interconnects on a substrate includes etching a substrate and wet cleaning the etched substrate. The method further includes active energy assist (AEA) baking the substrate after the wet-cleaning. The AEA baking includes placing the substrate on a heater pedestal in an AEA chamber, exposing the substrate to light having a wavelength equal to or greater than 400 nm, wherein said light is emitted by a light source and controlling the light source and the heater pedestal using a controller. | ||
| 申请公布号 | US9004914(B2) | 申请公布日期 | 2015.04.14 |
| 申请号 | US201313915287 | 申请日期 | 2013.06.11 |
| 申请人 | Taiwan Semiconductor Manufacturing Company, Ltd. | 发明人 | Ko Chung-Chi;Chou Chia Cheng;Lin Keng-Chu;Liou Joung-Wei;Jeng Shwang-Ming;Chen Mei-Ling |
| 分类号 | A01H5/02;H01L21/768;H01L21/3105;H01L21/70;H01L21/02 | 主分类号 | A01H5/02 |
| 代理机构 | Lowe Hauptman & Ham, LLP | 代理人 | Lowe Hauptman & Ham, LLP |
| 主权项 | 1. An Active Energy Assist (AEA) baking chamber, said chamber comprising: an AEA light source assembly; a heater pedestal; and a controller for controlling a power input to the AEA light source assembly and a power input to the heater pedestal. | ||
| 地址 | TW | ||