| 发明名称 | Device for machining a substrate and a method for this purpose | ||
| 摘要 | In a device for machining, in particular etching and/or developing, substrates, in particular wafers, in particular etching and/or developing, having a turntable, the turntable has a Venturi gap. | ||
| 申请公布号 | US9004497(B2) | 申请公布日期 | 2015.04.14 |
| 申请号 | US201213690887 | 申请日期 | 2012.11.30 |
| 申请人 | solar-semi GmbH | 发明人 | Muffler Pirmin |
| 分类号 | B23B31/30;B25B11/00;H01L21/67;B44C1/22;H01L21/683 | 主分类号 | B23B31/30 |
| 代理机构 | Bachman & LaPointe, P.C. | 代理人 | Bachman & LaPointe, P.C. |
| 主权项 | 1. A device for machining a substrate comprising a turntable having an upper surface adapted to receive a substrate, a bottom part and a Venturi gap defined between the upper surface and the bottom part, the bottom part of the turntable is provided with a duct which receives a pressure medium from a pressure medium source, the upper surface of the turntable is provided with a plurality of through holes communicating with the duct for allowing the pressure medium to escape from the duct, a diffuser is inserted into the bottom part of the turntable and forms the Venturi gap, and the turntable has a chamfer on an upper circumferential edge of the turntable for directing the medium into a region below the turntable. | ||
| 地址 | Radolfzell DE | ||