发明名称 SLIT NOZZLE AND SUBSTRATE COATER USING SAME
摘要 The present invention relates to a slit nozzle for a substrate coater which spreads a medicinal fluid on surfaces of a treated substrate, and to the substrate coater having the same. Provided are a substrate coater which can prevent a medicinal fluid spread unnecessarily by forming a medicinal fluid flow path in which a medicinal fluid inlet receiving the medicinal fluid from a medicinal fluid pump is formed on an upper side of the center, and an area having the growing width from the medicinal fluid inlet to an outlet is formed, forming an inhale flow path which inhales the medicinal fluid discharged from the outlet on both sides of the bottom adjacent to the outlet, and spreading the medicinal fluid in only a spread area, and can uniformly adjust the spread thickness of the center and the edge in the spread area of the treated substrate; and a slit nozzle used in the same.
申请公布号 KR20150039901(A) 申请公布日期 2015.04.14
申请号 KR20130118256 申请日期 2013.10.04
申请人 주식회사 케이씨텍 发明人 이경일이경일
分类号 B05C5/02;B05C11/10 主分类号 B05C5/02
代理机构 代理人
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