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发明名称
APPARATUS AND METHOD OF DEPOSITING FILM
摘要
<p>본 발명은 기판 위에 막을 형성하기 위한 증착 장치 및 증착 방법을 기재하고 있다. 서로 다른 방향을 갖는 반응 기체에 기판을 노출시켜 기판 위에 막을 형성한다. 한 실시예에서, 기판 위에 중간 두께를 갖는 막을 형성한 후기판을 한 반응실에서 다른 반응실로 이송된다. 따라서 균일한 두께를 갖는 막이 증착되어, 두께 불균형으로 인해 발생하는 디플리션 효과(depletion effect)를 상쇄시킨다.</p>
申请公布号
KR101512079(B1)
申请公布日期
2015.04.14
申请号
KR20080030850
申请日期
2008.04.02
申请人
发明人
分类号
C23C16/455;H01L21/205
主分类号
C23C16/455
代理机构
代理人
主权项
地址
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