Techniques for processing a substrate using a mask

摘要

Herein, an improved technique for processing a substrate is disclosed. In one particular exemplary embodiment, the technique may be achieved using a mask for processing the substrate. The mask may be incorporated into a substrate processing system such as, for example, an ion implantation system. The mask may comprise a first base; and a plurality of fingers spaced apart from one another to define one or more gaps.

主权项

1. An apparatus for processing a substrate, the apparatus comprising:
an ion source for generating an ion beam containing ions of desired dopant species, the ion beam comprising first and second parts proximate to one another; and a mask disposed between the ion source and the substrate, wherein one of the substrate and the mask is configured to translate relative to the other one of the substrate and the mask while the substrate is being implanted by the ion beam, wherein the ions from the first part of the ion beam are configured to perform a selective ion implantation on the substrate and the ions from the second part of the ion beam are configured to perform a blanket ion implantation on the substrate, wherein the ions from the first and second part of the ion beam are configured to form, in the substrate, a first doped region and a second doped region being adjacent to the first doped region and having a dopant dose higher than the dopant dose in the first doped region.