Filter and method of the same

摘要

The present invention is characterized in that a filter made of resin comprises a through-hole film portion (14); and a structure reinforce portion (13), wherein a through-hole (15) is provided in a through-hole film portion (14), the thickness of the through-hole film portion (14) is from 0.5 to 2.0 μm, the bore of the through-hole (15) is from 0.05 to 0.5 μm, the thickness of the structure reinforce portion (13) is bigger than the thickness of the through-hole film portion (14), the structure reinforce portion (13) encloses the through-hole film portion (14), a damage-reduction structure is provided on the upper surface of the structure reinforce portion (13), and wherein, the damage-reduction structure may be an uneven structures.

主权项

1. A filter made of resin comprising:
a through-hole film portion; and a structure reinforce portion, wherein a through-hole is provided in the through-hole film portion, the thickness of the through-hole film portion is from 0.5 to 2.0 μm, the bore of the through-hole is from 0.05 to 0.5 μm, the thickness of the structure reinforce portion is bigger than the thickness of the through-hole film portion, the structure reinforce portion encloses the through-hole film portion, and a damage-reduction structure is provided on an upper surface of the structure reinforce portion, wherein the damage-reduction structure is at least one of an uneven structure, a low surface energy layer with a surface energy that is smaller than a surface energy of the structure reinforce portion, and a low elastic modulus layer with an elastic modulus that is smaller than an elastic modulus of the structure reinforce portion, and wherein the uneven structure is a convex curved surface or a concave curved surface.