Silicon oxide film forming method and apparatus

摘要

A method of forming a silicone oxide film includes: forming a silicon oxide film on a plurality of target objects by supplying a chlorine-containing silicon source into a reaction chamber accommodating the plurality of target objects; and modifying the silicon oxide film, which is formed by forming the silicon oxide film, by supplying hydrogen and oxygen or hydrogen and nitrous oxide into the reaction chamber and making an interior of the reaction chamber be under a hydrogen-oxygen atmosphere or a hydrogen-nitrous oxide atmosphere.

主权项

1. A method of forming a silicon oxide film, comprising:
forming a silicon oxide film on a plurality of target objects by supplying a film forming gas including a chlorine-containing silicon source and an oxidizing agent into a reaction chamber accommodating the plurality of target objects throughout a period of time for forming the silicon oxide film in a first step; and after forming the silicon oxide film, modifying the silicon oxide film by supplying hydrogen and oxygen or hydrogen and nitrous oxide into the reaction chamber and making an interior of the reaction chamber be under a hydrogen-oxygen atmosphere or a hydrogen-nitrous oxide atmosphere to increase an etching selectivity ratio of the silicon oxide film against a silicon nitride film, wherein a temperature in the reaction chamber while forming the silicon oxide film is approximately equal to a temperature in the reaction chamber while modifying the silicon oxide film.