Lithography system and method for storing positional data of a target

摘要

The invention relates to a lithography system for patterning a target, said system comprising a feedback control system comprising an actuator for displacing the target, a measurement system for measuring a position of said target, and a control unit adapted for controlling the actuator based on the position measured by the measurement system, said feedback control system having a first latency being a maximum latency between measuring and controlling the actuator based on said measuring, a storage system for storing the measured positions, comprising a receive buffer and a storage unit with a second latency being an average latency between receiving measured positions in the receive buffer and storing said measured positions in the storage unit, wherein the first latency is at least an order of magnitude smaller than the second latency, the feedback control system comprising a unidirectional connection for transmitting said measured positions to the storage system.

主权项

1. Lithography system for writing a pattern on a target using one or more exposure beams, said system comprising:
a feedback control system comprising an actuator for displacing the target within the lithography system, a measurement system for substantially continuously measuring a position of the target within the lithography system, and a control unit adapted for controlling the actuator based on the position measured by the measurement system, said feedback control system having a first latency defined as a maximum latency between said measuring and said controlling the actuator based on said measuring, a storage system for storing the measured positions, said storage system comprising a receive buffer and a storage unit, said storage system having a second latency defined as an average latency between receiving measured positions in the receive buffer and storing said measured positions in the storage unit, wherein the first latency is at least an order of magnitude smaller than the second latency, the feedback control system comprising a unidirectional connection for transmitting said measured positions to the storage system, and wherein the feedback control system is adapted for substantially continuous operation independent of said storage system.