发明名称 Devices for metallization
摘要 An electronic device which in one embodiment comprises a metallization stack is provided. The metallization stack comprises a barrier metal deposited electrolessly and a substantially gold-free wetting layer deposited electrolessly. Additionally, the barrier metal contacts the wetting layer, where the wetting layer is wettable by solder.
申请公布号 US9006893(B2) 申请公布日期 2015.04.14
申请号 US201313973382 申请日期 2013.08.22
申请人 Lam Research Corporation 发明人 Kolics Artur;Lee William T.;Redeker Fritz
分类号 H01L23/48;H01L21/768;H01L23/00 主分类号 H01L23/48
代理机构 Beyer Law Group LLP 代理人 Beyer Law Group LLP
主权项 1. An electronic device comprising a metallization stack, the metallization stack comprising a barrier metal deposited electrolessly and a substantially gold-free wetting layer deposited electrolessly, the barrier metal contacting the wetting layer, and the wetting layer being wettable by solder, wherein the barrier metal has a thickness of 0.2micrometer to 1 micrometer and all values and ranges subsumed therein, the barrier metal comprises at least one of the elements nickel and cobalt; wherein the wetting layer comprises: 1. tin or a tin alloy;2. silver tungsten alloy with 3-4 atomic percent tungsten;3. cobalt tin alloy, cobalt copper alloy, cobalt silver alloy, cobalt copper tin alloy, cobalt copper silver alloy, cobalt silver tin alloy, or cobalt copper silver tin alloy;4. nickel copper alloy, nickel silver alloy, nickel copper silver alloy, nickel copper tin alloy, nickel silver tin alloy, or nickel copper silver tin alloy;5. iron tin alloy, iron copper alloy, iron silver alloy, iron copper tin alloy, iron copper silver alloy, iron silver tin alloy, or iron copper silver tin alloy;6. a thickness of nickel alloy having a first composition and a thickness of nickel alloy having a second composition;7. a thickness of cobalt alloy having a first composition and a thickness of cobalt alloy having a second composition; or8. a thickness of iron alloy having a first composition and a thickness of iron alloy having a second composition; further comprising one or more electrical contact pads being at least partially covered by the barrier metal and/or one or more through-substrate via conductors being at least partially covered by the barrier metal; and solder contacting the wetting layer.
地址 Fremont CA US