Photonic device structure and method of manufacture

摘要

Disclosed method and apparatus embodiments provide a photonic device with optical isolation from a supporting substrate. A generally rectangular cavity in cross section is provided below an element of the photonic device and the element may be formed from a ledge of the supporting substrate which is over the cavity.

主权项

1. A method of forming a photonic structure, comprising:
etching a semiconductor substrate to create a cavity below a ledge portion of the semiconductor substrate; and forming an element of a photonic device from the ledge portion of the semiconductor substrate; and wherein the photonic device element comprises a waveguide core; wherein the method of forming the photonic structure further comprises filling the cavity with a cladding material; and wherein the cavity has a generally rectangular cross-sectional shape.