Method for creating S/TEM sample and sample structure

摘要

An improved method and apparatus for S/TEM sample preparation and analysis. Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small geometry (<100 nm thick) TEM lamellae. A novel sample structure and a novel use of a milling pattern allow the creation of S/TEM samples as thin as 50 nm without significant bowing or warping. Preferred embodiments of the present invention provide methods to partially or fully automate TEM sample creation, to make the process of creating and analyzing TEM samples less labor intensive, and to increase throughput and reproducibility of TEM analysis.

主权项

1. A method of extracting one or more samples for TEM analysis from a substrate, the method comprising:
loading the substrate with the sample to be extracted into an ion beam system; locating a first sample site on the substrate surface; imaging the sample site; identifying desired fiducial locations for determining the edge positions for said first sample site; milling a fiducial at each of the desired fiducial locations wherein the milling includes a combination of at least one high precision rectangular fiducial mark around which is milled one low precision circular fiducial mark; determining the edge positions for the desired sample with respect to said fiducial marks; automated milling of the substrate surface on either side of the desired sample site leaving a thin layer of material; and extracting the sample.