| 摘要 |
PROBLEM TO BE SOLVED: To provide an alignment method with excellent practicability capable of performing high-precision alignment.SOLUTION: When a substrate 12 and a mask 11 are aligned, a second imaging part 14 with a high imaging magnification is positioned using imaging data picked up by a first imaging part 13 with a low imaging magnification. With an imaging range of the second imaging part 14 as a reference, positions of the substrate 12 and the mask 11 are corrected in two stages, i.e., a first alignment step using the imaging data picked up by the first imaging part 13, and a second alignment step using the imaging data picked up by the second imaging part 14. |
