发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To sufficiently reduce contact resistance of a source electrode formed on a surface of a semiconductor substrate.SOLUTION: A semiconductor device comprises: a left p layer 312 formed on an inner surface of a trench 25 formed on a surface of a semiconductor substrate 20; an nlayer 32 which is formed on surfaces of p layers 311, 312 and serves as a source region on each surface of each of the p layers 311, 312; a player 33 formed to pierce the nlayer 32 formed on the right p layer 311; and a common source electrode (main electrode) 50 to which the nlayer 32 and the player 33 on the right of a gate electrode 40, and the nlayer 32 in the trench 25 on the left of the gate electrode are connected.
申请公布号 JP2015070193(A) 申请公布日期 2015.04.13
申请号 JP20130204889 申请日期 2013.09.30
申请人 SANKEN ELECTRIC CO LTD 发明人 TANAKA YUKI;YOSHIE TORU;KAMITORI MIKIO;OZAWA YUSUKE
分类号 H01L29/78;H01L21/336;H01L29/12;H01L29/41;H01L29/417 主分类号 H01L29/78
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