EVAPORATION SOURCE, AND VACUUM VAPOR DEPOSITION DEVICE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a linear evaporation source capable of restraining temperature drop of an end region of a crucible with a simple structure, and obtaining uniformity of film thickness, and a vacuum vapor deposition device to which the evaporation source is mounted.SOLUTION: The evaporation device has: a crucible having a vapor deposition material part for housing a vapor deposition material, and heat insulation parts provided at both ends of the vapor deposition material; heating means for heating the vapor deposition material; and a vapor emission port provided on the vapor deposition part and emitting vapor evaporated by the heating means.