| 摘要 |
PROBLEM TO BE SOLVED: To provide a plate-like object transport device capable of suppressing contact with an elastic member of a non-contact suction holder and maintaining suction force of the non-contact suction holder.SOLUTION: A plate-like object W transport device comprises sucking and holding means 2 for sucking and holding a plate-like object W and moving means for moving the sucking and holding means 2 from a first prescribed position to a second prescribed position. The sucking and holding means 2 comprises a base part 21 connected to the moving means and a non-contact suction holder 22 which is supported in the base part 21,injects air to generate a negative pressure, and sucks the plate-like object W in a non-contat state. The non-contact suction holder 22 comprises a body part 22a including a flat lower surface and an ejection port 22d which opens in a central part of the lower surface of the body part 22a and ejects air along the lower surface of the body part 22a. The lower surface of the body part 22a is composed of an elastic member 22f. |
