METHOD OF PRODUCING METAL OXIDE FILM, METAL OXIDE FILM, THIN FILM TRANSISTOR, DISPLAY, IMAGE SENSOR, AND X-RAY SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a method of producing a metal oxide film capable of producing a dense metal oxide film at relatively low temperature under the atmospheric pressure, and to provide a metal oxide film, a thin film transistor having high mobility, a display, an image sensor and an X-ray sensor.SOLUTION: A method of producing a metal oxide film includes a step of forming a metal oxide precursor film by coating a substrate with a solution containing a metal nitrate, and then drying the coating film, and a step of transforming the metal oxide precursor film to a metal oxide film by irradiating the metal oxide precursor film with an ultraviolet ray including more than one peak component of illuminance of 10 mW/cmor more in a wavelength region of 300 nm or less. A metal oxide film produced by this method and a device including the same are also provided.