| 摘要 |
PROBLEM TO BE SOLVED: To provide a microdevice in which a stopper mechanism is improved, and to provide a method for manufacturing the same.SOLUTION: In a microdevice, a stopper unit 5f and a displacement limited unit 4f are formed in an acceleration sensor in order to limit movement of a detection frame 5c that rotates according to movement of an inertia mass body 5e. The stopper unit 5f is fixed to a support substrate 1. The displacement limited unit 4f is fixed to the detection frame 5c, and the movement of the detection frame 5c is limited by contacting the displacement limited unit 4f with the stopper unit 5f. When the detection frame 5c is in a stationary state, the displacement limited unit 4f and the stopper unit 5f are separated with a narrow gap. This narrow gap is formed by removing an insulation layer with a predetermined thickness. |
