| 摘要 |
PROBLEM TO BE SOLVED: To provide a mark confirming jig capable of quickly confirming a position of a mark.SOLUTION: A mark confirming jig 100 is mounted upward of a wafer W10 in a state where the wafer W10 having a mark M10 is loaded on a wafer pedestal 50. On the mark confirming jig 100, a frame part 11a is provided which is for visually confirming a position of the mark M10. |
