PROXIMITY EFFECT CORRECTION METHOD, PROXIMITY EFFECT CORRECTION PROGRAM AND PROXIMITY EFFECT CORRECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To calculate a highly accurate proximity effect correction amount.SOLUTION: An approximate function allowing for interpolation of the energy amount and spread of back scattering more accurately than a prior art is applied to the back scattering amount obtained by simulation or experiment, and based on the approximate function, the proximity effect correction amount is calculated, so that a highly accurate proximity effect correction amount can be calculated without increasing computational quantity.