PRODUCTION METHOD OF METAL HYDROXIDE, AND MANUFACTURING METHOD OF SPUTTERING TARGET

摘要

PROBLEM TO BE SOLVED: To provide a highly mass-productive production method of a metal hydroxide and a manufacturing method of a target, which do not require waste liquid treatment of electrolytic solution, and can obtain the metal hydroxide having a desired uniform particle diameter.SOLUTION: A gas diffusion electrode 20 which is composed by laminating a hydrophobic gas diffusion layer 20a and a hydrophilic reaction layer 20b, is installed in an electrolytic tank 1 to partition the inside of the electrolytic tank. Electrolytic solution S is contained in a settling tank 11 facing the reaction layer of the partitioned electrolytic tank, and an IGZO target scrap 4 is immersed in the electrolytic solution. Voltage is applied between both electrodes while the gas diffusion electrode is used as a cathode and the IGZO target strap is used as an anode, and oxygen is supplied into an air tank 10 facing the gas diffusion layer of the partitioned electrolytic tank to perform electrolysis, and indium hydroxide, gallium hydroxide and zinc hydroxide are precipitated in the electrolytic solution.