ENVIRONMENT CONTROL TYPE CHARGED PARTICLE OBSERVATION SYSTEM

摘要

PROBLEM TO BE SOLVED: To efficiently detect secondary electrons while keeping the vicinity of a sample in atmospheric pressure.SOLUTION: A sample holder has a minute orifice capable of detecting secondary electrons in the upper part of a sample to efficiently detect the secondary electrons, a diaphragm allowing charged particles to permeate in the lower part of the sample, and a structure capable of pressure-controlling only the vicinity of the sample. In pressure-controlling, an exhaust hole for exhausting gas is provided at a position other than a charged particle passage in the lower part of the sample, and the movement change of the sample can be observed while heating the sample in the structure. The minute orifice for the charged particle passage is set so that the minute orifice for detecting the secondary electrons and the charged particle passage are not coaxially positioned during observation by charged particles.