发明名称 RADIATION-SENSITIVE RESIN COMPOSITION, CURED FILM, METHOD FOR PRODUCING THE SAME, AND DISPLAY ELEMENT
摘要 PROBLEM TO BE SOLVED: To provide a radiation-sensitive resin composition that sufficiently satisfies general characteristics, such as sensitivity, and enables reduction of defective shape of a pattern and defective adhesion due to post exposure time delay after exposure, to provide a cured film formed from the radiation-sensitive resin composition and a method for forming the cured film, and to provide a display element having the cured film.SOLUTION: The radiation-sensitive resin composition contains: a polymer component having a first structural unit including an acid-dissociative group, a second structural unit including a crosslinkable group, and a third structural unit being at least either one selected from a structural unit including a group represented by formula (1) and a structural unit including a group represented by formula (2); and a radiation-sensitive acid generator.
申请公布号 JP2015069179(A) 申请公布日期 2015.04.13
申请号 JP20130205942 申请日期 2013.09.30
申请人 JSR CORP 发明人 TANGE SATOSHI;MATSUMURA SHINJI;SHIMIZU MAKOTO
分类号 G03F7/039;C08F20/32;G03F7/004;H01L21/027 主分类号 G03F7/039
代理机构 代理人
主权项
地址