| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a physical quantity sensor which can improve sensitivity while suppressing an increase in power consumption and which is easy in manufacturing, and also to provide an atmospheric pressure sensor, an electronic apparatus and a moving body.SOLUTION: A physical quantity sensor 1 includes: a wall part constituting an airtight space S; a diaphragm part 21 which is placed in a part of the wall part and deformed by receiving pressure; and a CMOS inverter circuit 3 having an NMOS transistor 31 and a PMOS transistor 32 which are placed in the diaphragm part 21 and in which current-voltage characteristics are fluctuated in mutually opposite directions by deformation of the diaphragm part 21.</p> |
