发明名称 COATING APPARATUS
摘要 <p>The main aim of the present invention is to shorten the time it takes to paint the surface while maintaining uniformity in application. An example embodying the present invention includes painting devices such as the slit nozzle, the means of moving, and the control unit. The slit nozzle has a slit-shaped discharge opening from which paint is emitted. The means of moving moves the slit nozzle relative to the location of the circular-shaped substrate. The control unit controls the means of moving. It also implements a first steady-speed painting process that moves the slit nozzle at the first speed relative to the substrate by controlling the means of moving, followed by an accelerated painting process that speeds it up to the second speed faster than the first speed against the slit nozzle′s substrate and a second steady-speed painting process that moves the slit nozzle at the second speed relative to the substrate.</p>
申请公布号 KR20150039690(A) 申请公布日期 2015.04.13
申请号 KR20140131436 申请日期 2014.09.30
申请人 发明人
分类号 B05D1/26;B05D1/40;G03F7/16;H01L21/56 主分类号 B05D1/26
代理机构 代理人
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