VACUUM VAPOR DEPOSITION DEVICE

摘要

PROBLEM TO BE SOLVED: To prevent diameter reduction or clogging of a nozzle due to accumulation of a vapor deposition material onto a nozzle for emitting vapor in a vacuum vapor deposition device.SOLUTION: A crucible 7 houses a vapor deposition material 6, and a nozzle 1 for emitting vapor is formed at a tip of the crucible 7. A heater 3 for heating the crucible 7 is arranged around the crucible 7. A heat transfer member 5 for adjusting temperature distribution of the crucible 7 is arranged between the heater 3 and the crucible 7. An existing range of the heater 3 is set to a range of 1/3 or more and 2/3 or less of entire length of the crucible 7 from the nozzle 1 side.