发明名称 |
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME |
摘要 |
PROBLEM TO BE SOLVED: To improve switching characteristics of a semiconductor device.SOLUTION: A semiconductor device 100 comprises: a first compound semiconductor layer 6; a second compound semiconductor layer 8 having band gap larger than that of the first compound semiconductor layer; a p-type third compound semiconductor layer 14 provided on a part of the second compound semiconductor layer 8; a p-type fourth compound semiconductor layer 16 which is provided on the third compound semiconductor layer 14 and has higher resistance than the third compound semiconductor layer 14; and a gate electrode 18 provided on the fourth compound semiconductor layer 16. |
申请公布号 |
JP2015070151(A) |
申请公布日期 |
2015.04.13 |
申请号 |
JP20130204162 |
申请日期 |
2013.09.30 |
申请人 |
TOYOTA CENTRAL R&D LABS INC;TOYOTA MOTOR CORP |
发明人 |
KANECHIKA MASAKAZU;KUWABARA MAKOTO;UEDA HIROYUKI;TOMITA HIDEMIKI |
分类号 |
H01L21/337;H01L21/338;H01L27/098;H01L29/778;H01L29/808;H01L29/812 |
主分类号 |
H01L21/337 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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