| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus which can achieve many functions using one mirror thereby capable of being downsized.SOLUTION: The laser beam machining apparatus comprises: a visible laser beam source for emitting a visible laser beam on a second optical axis crossing with a first optical axis of a laser beam being the emitting direction of a laser oscillator; a mirror existing on the first optical axis, also arranged on the second optical axis, making the laser beam incident on one surface and making the visible laser beam incident on the other surface; a laser scanning part for scanning the laser beam and the visible laser beam incident via the mirror onto a machining surface of a machining object; and an output detection part which is arranged on the first optical axis and oppositely to the laser oscillator with the mirror placed between the laser oscillator and the output detection part and which detects output of the laser beam. The mirror reflects the laser beam incident on the one surface, transmits a part of the laser beam, and also transmits the visible laser beam incident on the other surface, and the output detection part receives a part of the laser beam having passed through the mirror. |
