| 摘要 |
<p>PROBLEM TO BE SOLVED: To precisely determine the quality of a discharge operation of a plurality of discharge port rows.SOLUTION: A discharge head 31 applies substrate processing to a substrate 9 by discharging liquid droplets toward the substrate 9 from a plurality of discharge ports 314. The plurality of discharge ports 314 are formed of a plurality of discharge port rows 313a to 313d. A light emitting part 51 emits planar light 510 below an inspection position. When the liquid droplets are discharged from the discharge head 31, the liquid droplets generate bright spots when passing through the planar light 510. An inspection image is acquired by imaging the bright spots by imaging means 52 and the discharge operation of each discharge port 314 is determined on the basis of the inspection image. A bat 61 on which a slit 62 for passing only liquid droplets from a specific discharge port row 313 is formed is disposed between the discharge head 31 and the planar light 510. Only the liquid droplets of an arbitrary discharge port row are imaged by moving the bat 61 in order in the row arrangement direction of the discharge port row. As the liquid droplets do not overlap with each other, the discharge operation can be precisely determined.</p> |
