| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a coating apparatus capable of suppressing deterioration in coating quality.SOLUTION: A coating apparatus 10 of the present invention comprises: a first flow passage 13 connecting between a tank 11 for storing a coating liquid and a head 12 forming a coating film by coating the coating liquid on an object 19; a first pump 14 provided in the first flow passage 13 and supplying the coating liquid to the head 12 from the tank 11 in a coating execution period; a filter 15 provided in the first flow passage 13, upstream from the first pump 14 and filtering the coating liquid; a second flow passage 16 branched from the first flow passage 13, at a position between the filter 15 and the first pump 14 and connected to the first flow passage 13 on the upstream side of the filter 15; and a second pump 17 provided in the second flow passage 16 and circulating the coating liquid via at least the filter 15 and the second flow passage 16 in a coating stopping period.</p> |
