SUBSTRATE BONDING APPARATUS

摘要

PROBLEM TO BE SOLVED: To appropriately transport a substrate with attachments.SOLUTION: A transport support unit 212b includes a bracket 213 and a support unit main body 214. The bracket 213 is a member formed into a generally L-shape to include a bottom surface 215 formed into a rectangular shape and a side surface 216 bent vertically from one end of a transport arm 210b in a short length direction thereof and extending upward. The support unit main body 214 extends from an upper end of the side surface 216 in a direction orthogonal to an extension direction of (vertical direction to) the side surface 216 toward an adjacent transport arm 210c. The transport support unit 212b contacts a generally central portion of an FPC 124a in an extension direction thereof and supports the FPC 124a.