WORKPIECE MEASUREMENT DEVICE AND METHOD, AND ORGANIC EL MANUFACTURING DEVICE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a workpiece measurement device and method, and a manufacturing device using the device, which can detect a dimension, position, and rotation posture of a workpiece accurately when a positional deviation of a sensor occurs.SOLUTION: A workpiece measurement device detects a reference part 45 provided outside a side of a circuit board 6 placed on a placing part 48 and the side of the circuit board 6 simultaneously. The workpiece measurement device has a processing part 70 for calculating a distance between an end of the reference part 45 and the side of the circuit board 6 according to detection results. The circuit board 6 is placed on the placing part 48 provided in a vacuum relay device 100. The reference part 45 provided in an unchangeable part 22, which restrains deformation by evacuating the air in the vacuum relay device 100, and the side of the circuit board 6 placed on the placing part 48 provided in the unchangeable part 22 are simultaneously detected.