| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a cleaning method and a cleaning device which can reduce an uncleaned part of an object to be cleaned or solve the problem of the uncleaned part, and provide a manufacturing method of a glass substrate for a magnetic disc and the like.SOLUTION: In a cleaning method of cleaning an object 10 to be cleaned by acting an ultrasonic wave 20 on the object 10 to be cleaned supported by support members 3a and 3b in process liquid, members 31 and 32 having a function of changing the travel direction of the ultrasonic wave 20 are disposed in a region which the ultrasonic wave 20 emitted from an ultrasonic vibrator 2 below a processing tank 1 reaches, and the ultrasonic wave whose travel direction is changed by the members 31 and 32 is made to act on a portion of the object 10 to be cleaned where the effect of the ultrasonic wave 20 is relatively weak.</p> |
