| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a coating equipment for detecting it precisely that air bubbles in a quantity to exert influences upon the discharge state of a liquid are formed in the liquid in a coating head.SOLUTION: A coating equipment comprises a detector 15 for detecting the pressure of a liquid 5 in a coating head 11. A control section 18 decides that air bubbles are generated in the liquid 5 in the coating head 11, on the basis of a value associated with the rate, at which the pressure detected by a detector 15 drops, at the time when the pressure of the liquid 5 in the coating head 11 disappears accordingly as the liquid 5 is discharged from a discharge port 11a when an intermittent driving part 14 closes a feed passage 13 while an opening/closing changeover section 17 is closing a recovery passage 16.</p> |
