| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a coating device and coating method which can adequately supply a coating liquid to a slit nozzle even when the coating liquid has high viscosity or resistance is generated in a supply system of the coating liquid such as a filter, or the like.SOLUTION: A supply system of a coating liquid includes a storage tank 61 for storing a coating liquid, and a pump 44 which feeds the coating liquid in the storage tank 61 to a slit nozzle 13. The storage tank 61 is arranged in a chamber 62. The chamber 62 is connected to a supply part of compressed air through a pressure-variable regulator 49 and an opening/closing valve 51. A filter 63 and an opening/closing valve 53 are arranged between the pump 44 and the storage tank 61. The pump 44 is connected to both end parts of the slit nozzle 13 through a pair of opening/closing valves 54, 55. A manometer 43 for measuring a pressure of the coating liquid pumped by the pump 44 is arranged on piping between the opening/closing valve 53 and the pump 44.</p> |
