| 摘要 |
FIELD: measurement equipment.SUBSTANCE: invention relates to metrology. A method for determining dynamic errors of micromechanical inertial sensors consists in the fact that determination of a dynamic error is performed by comparison of characteristics set by a stand of oscillations to characteristics reproduced with a micromechanical sensor or a module. With that, oscillations are reproduced with the stand and recorded with the micromechanical sensor or an inertial measurement module in a frequency spectrum covering the whole frequency range of the object operation and corresponding to certain operating conditions with further treatment by the following formula: S(?)=|W(j?)|·S(?), where S(?) - spectral power density of a signal of the micromechanical sensor or module, S(?) - spectral power density of an input signal from the stand, |W(j?)| - an amplitude-frequency characteristic of the sensor or the module being tested. A calculation of spectral densities of power of input and output signals is performed by transition from a time domain to a frequency domain by Fourier transformation; with that, an experimentally determined amplitude-frequency characteristic |W(j?)| of the sensor or the module characterises dispersion D of error of the object being tested in the specified frequency spectrum, and root-mean-square deviation of dynamic error of the micromechanical sensor is in compliance with the following expression:EFFECT: higher accuracy. |
