| 摘要 |
<p>Disclosed is a film-based mems mass producing system. According to an aspect of the present invention, provided is a film-based mems mass producing system which comprises a tape attaching part attaching double side tape on the upper surface of a support panel; a film attaching part attaching film which is a base material on the upper surface of the double side tape; and a pin installation part installing multiple fixing pin to vertically penetrate the film, double side tape, and support panel.</p> |
