发明名称 PARTICLE COLLECTION METHOD, PARTICLE COLLECTOR, AND PARTICLE MEASUREMENT DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To provide a particle collection method and particle collector capable of collecting micro particles in a wide range to contribute to the measurement of the particles.SOLUTION: The particle collector includes: a cyclone vessel 10 for guiding particles downward while rotating them; an exhaust pipe 14 for exhausting gas upward in the cyclone vessel 10; a gas introduction unit 13 for introducing gas including the particles into the cyclone vessel 10 along the circumferential direction of the cyclone vessel 10; and a supersaturation steam generation unit 15 for generating supersaturation steam in the cyclone vessel 10. In the cyclone vessel 10, the particles are transmitted through the supersaturation steam, steam molecules are condensed using the particles as cores, and the particles are grown.</p>
申请公布号 JP2015064269(A) 申请公布日期 2015.04.09
申请号 JP20130197841 申请日期 2013.09.25
申请人 TOKYO ELECTRON LTD 发明人 IKEDA KYOKO
分类号 G01N15/00;G01N1/02;G01N15/14 主分类号 G01N15/00
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