发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 A semiconductor device includes a carrier, several dies disposed on a surface of the carrier and several scribing lines defined on the surface of the carrier. The scribing lines include several continuous lines along a first direction and several discontinuous lines along a second direction. Further, a method of dies singulation includes providing a carrier, disposing several dies on a surface of the carrier according to several scribing lines including several continuous lines along a first direction and several discontinuous lines along a second direction, cutting the carrier according to the continuous lines along the first direction, and cutting the carrier according to the discontinuous lines along the second direction.
申请公布号 US2015097272(A1) 申请公布日期 2015.04.09
申请号 US201314049898 申请日期 2013.10.09
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. 发明人 JANG BOR-PING;HWANG CHIEN LING;LIAO HSIN-HUNG;LIN YEONG-JYH
分类号 H01L23/544;H01L21/82;H01L25/065 主分类号 H01L23/544
代理机构 代理人
主权项 1. A semiconductor device, comprising: a carrier; a plurality of dies disposed on a surface of the carrier; a plurality of scribing lines defined on the surface of the carrier; wherein the plurality of scribing lines include a plurality of continuous lines along a first direction and a plurality of discontinuous lines along a second direction.
地址 Hsinchu TW