| 摘要 |
PROBLEM TO BE SOLVED: To provide toughness to a probe.SOLUTION: A probe card for an integrated circuit includes a circuit board 42, at least one cantilever type probe, a first support structure 44' and a second support structure. The circuit board 42 includes at least one conductive columnar body 33. At least one probe includes a rear end part 41, a curved part 43, a connection arm 45, and a pointed end part; the connection arm 45 is arranged so as to combine the pointed end part with the curved part 43; and the rear end part 41 is arranged so as to combine the curved part 43 with at least one conductive columnar part 33. The curved part 43 forms a first angle 55 with a horizontal line; the connection arm 45 forms a second angle 57 with the horizontal line; and the first angle 55 is different from the second angle 57. The first support structure 44' is formed on the circuit board 42 so as to support the curved part 45, and the second support structure is formed on the circuit board 42 so as to support the connection arm 45. |
