| 摘要 |
An exposure mask according to the present invention comprises: a mask substrate; a body part which is arranged on the mask substrate and has a shape corresponding to a shape of an exposed part of a metal layer; multiple branch parts which are arranged on the mask substrate and are extended to the outside of the body part from the body part along the circumference of the body part on a plane. Accordingly, the exposure mask is able to control the inclination of an inclined plane of a first insulation layer by controlling exposure amount when forming a contact hole, thereby preventing contact defects between layers connected through the contact hole. |
