Optical Position-Measuring Device

摘要

A position-measuring device for detecting the position of two objects movable relative to each other, includes a measuring standard that is joined to one of the two objects, as well as a scanning system for scanning the measuring standard, the scanning system being joined to the other of the two objects. The scanning system permits a simultaneous determination of position along a first lateral shift direction and along a vertical shift direction of the objects. To that end, on the part of the scanning system, two scanning beam paths are formed, in which a group of phase-shifted signals is able to be generated in each case at the output end from interfering partial beams of rays. In addition, via the scanning system, at least a third scanning beam path is formed, by which it is possible to determine position along a second lateral shift direction of the objects. The beam from a light source is able to be supplied to the scanning system via a first light guide and coupling-in optics in common for all three scanning beam paths. The interfering partial beams of rays produced in the three scanning beam paths are able to be coupled via common coupling-out optics, into a second light guide which supplies these beams of rays to a detector system.

主权项

1. An optical position-measuring device for detecting a position of two objects movable relative to one another, comprising:
a measuring standard connected to one of the two objects; a scanning system adapted to scan the measuring standard, the scanning system being connected to the other one of the two objects, the scanning system adapted to permit simultaneous determination of position along a first lateral shift direction and along a vertical shift direction of the objects, the scanning system adapted to form first and second scanning beam paths to generate a group of phase-shifted signals at an output end from interfering partial beams of rays, the scanning system adapted to form a third scanning beam path to determine position along a second lateral shift direction; a light source adapted to supply a beam to the scanning system via a first light guide and common coupling-in optics for all three scanning beam paths; and common coupling-out optics adapted to couple the interfering partial beams of rays produced in the three scanning beam paths into a second light guide to supply the interfering partial beams of rays to a detector system.