发明名称 MULTIPLE ZONE COIL ANTENNA WITH PLURAL RADIAL LOBES
摘要 A low inductance coil antenna for a plasma reactor has multiple radial zones of plural conductor lobes extending radially from respective RF supply and ground rings.
申请公布号 US2015097479(A1) 申请公布日期 2015.04.09
申请号 US201314107184 申请日期 2013.12.16
申请人 APPLIED MATERIALS, INC. 发明人 Knyazik Vladimir;Banna Samer;Tantiwong Kyle R.
分类号 H01J37/32 主分类号 H01J37/32
代理机构 代理人
主权项 1. A coil antenna comprising an inner antenna and an outer antenna surrounding said inner antenna, wherein: (A) said outer antenna comprises: (1) plural conductive outer lobes extending in respective radial directions with respect to a central axis, each of said plural conductive outer lobes comprising an elongate conductor having a first outer end and a second outer end;(2) a first outer connection to the first outer ends of said plural conductive outer lobes and a second outer connection to the second outer ends of said plural conductive outer lobes, said first and second outer connections being adapted for coupling to an RF power source; (B) said inner antenna comprises: (1) plural conductive inner lobes extending in respective radial directions with respect to the central axis, each of said plural conductive inner lobes comprising an elongate conductor having a first inner end and a second inner end;(2) a first inner connection to the first inner ends of said plural conductive inner lobes and a second inner connection to the second ends of said plural conductive lobes, said first and second inner connections being adapted for coupling to an RF power source.
地址 Santa Clara CA US